E12 ULSI Process Integration 8
Lead Organizer:
Cor Claeys (imec)
Co-organizers:
S. Deleonibus (CEA-LETI)
,
Hiroshi Iwai (Tokyo Institute of Technology)
,
Junichi Murota (Tohoku University)
and
M. Tao (University of Texas at Arlington)
Monday, October 28, 2013
08:55-10:30
10:30-12:00
Back-end Processing 1
Continental 7, Tower 3, Ballroom Level
Chair(s): Eric Eisenbraun and Hiromu Ishii, D. Sc.
14:00-15:00
15:00-16:30
Tuesday, October 29, 2013
08:10-09:40
10:00-12:10
Epitaxial Processing
Continental 7, Tower 3, Ballroom Level
Chair(s): Seiichi Miyazaki and Hiroshi Iwai
14:00-15:40
16:00-17:30
Front-end Processing
Continental 7, Tower 3, Ballroom Level
Chair(s): Junichi Murota and Vinh Le Thanh
Wednesday, October 30, 2013
08:40-09:40
10:00-11:30
14:00-15:50
