1708
Fast Macropore Etching Via Large Current and High HF Concentration On p-Type Silicon

Wednesday, October 30, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Daohan Ge , State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China, Zhenjiang, China
Naifei Ren , School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
Quan Wang , State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China, Zhengjiang City, China

Abstract:

  • D1-1708 (954.3KB) - Abstract Text
See more of: Corrosion General Poster Session
See more of: D1: Corrosion General Poster Session
See more of: Corrosion, Passivation, and Anodic Films
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