2669
Internal Stress Effect On Nonlinearity of Absolute Pressure Sensor Fabricated With Single-Sided Surface-Micromachining Processes

Tuesday, October 29, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Quan Wang , State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China, Zhengjiang City, China
Y M Zhang , School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
W Mao , School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
Daohan Ge , State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China, Zhenjiang, China

Abstract:

  • J1-2669 (104.6KB) - Abstract Text
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