2366
Conformal Electroless Deposition On monolayers for TSV Applications

Monday, October 28, 2013: 08:30
Union Square 23/24, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Michele Cervati , Politecnico di Milano
Guido Carnevali , Politecnico di Milano
Silvia Armini, Ph.D. , imec, Heverlee, Belgium
Luca Magagnin, PhD , Politecnico di Milano, Milan, Italy

Abstract:

  • F5-2366 (573.6KB) - Abstract Text