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Effect of Neutral Beam Treatment On Nanocrysallization of Silicon Thin Film By Neutral Beam Assisted CVD At Near Room Temperature

Tuesday, October 29, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Dong Hyeok Lee, Master , Dept. of Display and Semiconductor Physics, Korea University
Jin Nyoung Jang, PhD , Dept. of Display and Semiconductor Physics, Korea University
MunPyo Hong, PhD , Dept. of Display and Semiconductor Physics, Korea University, Sejong City, South Korea

Abstract: