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Fabrication of Line Pattern of InP By Metal-Assisted Chemical Etching Under UV Irradiation

Tuesday, October 29, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Yuta Suzuki, BE , Department of Applied Chemistry, Kogakuin University, Hachioji, Japan
Hidetaka Asoh, PhD , Department of Applied Chemistry, Kogakuin University
Sachiko Ono, PhD , Department of Applied Chemistry, Kogakuin University, Tokyo, Japan

Abstract:

  • A1-0132 (700.4KB) - Abstract Text