(Invited) Pedagogical Approach for Higher Education in Microelectronics and Nanotechnologies in France: Specific Actions on the Thin Film Technologies

The microelectronics field is in a strong evolution since more than 40 years. To maintain the level of knowledge, skills and know-how of the engineers and doctors in this field, the academic institutions must have a permanent possibility of adaptation in order to answer to the need of the economical world. This supposes to dispose of tools and facilities as well in computer aided design (CAD) as in process fabrication. Unfortunately, the cost of the software, equipment and maintenance in this field become huge and only a sharing of the associated expenses in the frame of a network becomes realistic for the academic world.

This supposes an efficient organization that allows sharing the facilities in the frame of common interuniversity centers. The training in microelectronics and in nanotechnologies in France has been structured as a national network since more than 30 years. This network is composed of 12 regional interuniversity centers that include technological, design, and test facilities. It is presently a Public Interest Consortium (GIP), an official structure founded by the Ministry of Higher Education, a kind of Open University without walls. The network mission is to support animation and educational activities in this field at a national level. In order to maintain both quality and attractiveness to students, as well as the motivation of the professorial body and the adaptation to the economical world, a strategy of innovative projects has been established since 2006.

Innovative projects consist to propose the creation of a new lab-work that needs new equipment and the adaptation of the educator. Due to the evolution of the technologies, more especially with More than Moore trend, an effort is made in the wider spectrum of applications, more especially in the field of large area electronics that includes thin film technologies. The applications are numerous, from the displays to the MEMS, OMEMS to many types of sensors. This approach has been reinforced by the support of specific multiannual programs since 2009 and more especially in the frame of French Excellence Initiative Program (IDEFI) especially dedicated to innovative education. The project entitled FINMINA (for Innovative Education in Microelectronics and Nanotechnologies) started in 2012 is managed by the consortium (GIP-CNFM). Since 2009, many projects were selected by the consortium in order to develop some activities in thin film devices.

This approach has been reinforced by the support of specific multiannual programs since 2009 and more especially in the frame of the French Excellence Initiative Program (IDEFI) specially dedicated to innovative education. The project entitled FINMINA (for Innovative Education in Microelectronics and Nanotechnologies) is managed by the consortium (GIP-CNFM). Since 2009, many projects were selected by the GIP-CNFM in order to develop some activities in thin film devices. We can mention polycrystalline thin film transistors (fig. 1), CMOS-like TFT based circuits (fig. 2), magnet sensor based on TFT (fig.3), pressure and mechanical stress (fig. 4), sensors flexible electronics, organics optoelectronics devices (fig. 5), sensors based on suspended membrane or cantilevers, , chemical and biologic detectors based on suspended gates of thin film transistors.

This paper will present the national network and namely its organization and its missions. Then, several projects involving more especially the thin film technologies will be detailed. A synthesis of the training and a discussion of the results will conclude the presentation.

Acknowledgment: The authors want to thank their colleagues of the national network for their contribution in many works presented in this document.

References:

[1]    G.E. Moore, "Cramming more components onto integrated circuits", Electronics Magazine, vol. 38 (8), p.114 (1965)

[2]    CNFM: "Coordination Nationale pour la Formation en Microélectronique et en nanotechnologies"; website: http://www.cnfm.fr (also website of GIP-CNFM).

[3]    O. Bonnaud, G. Rey, "The French microelectronics training network supported by industry and education ministries", Proc. IEEE Int. Conf. on Microelectronic Systems Education (MSE'97), July 1997, pp. 121-122

[4]    “More-than-Moore” White Paper. Editors: W. Arden, M. Brillouët, P. Cogez, M. Graef, B. Huizing, R. Mahnkopf, International Roadmap Committee of ITRS, 2010, www.itrs.net/Links/2010ITRS/IRC-ITRS-MtM-v2%203.pdf

[5]    FIEEC Communiqué "Agir pour l'attractivité de nos disciplines" translated as "Acting for the attractiveness of our disciplines". October 2012; ttp://www.sitelesc.fr/Portal_Upload/Files/Com_Presse_Agir_Pour_ Electronique.pdf

[6]    O. Bonnaud, "Attracting more students and educating well-trained engineers: sensible ways to advance the field of engineering education", Invited communication, International Engineering Conference Berlin (Germany), 29 - 30 October 2012

[7]    IDEFI : http://www.agence-nationale-recherche.fr/investissements davenir /AAP-IDEFI-2011.html – ANR-11-IDFI-0017 FINMINA