AlGaN/ GaN are the most promising candidates for HEMT sensor materials. A thin film of undoped Al0.25Ga0.75N layer (150 Å) is deposited onto the surface of 3 μm-thick undoped GaN buffer layer, which in turn is deposited on the top of Silicon substrate by metal-organic chemical vapor deposition (MOCVD) process. Using mesa ICP etching, active device area is formed. Then four different metals of various thicknesses, i.e. Ti, Al, Ni and Au, are deposited to make an ohmic contact and is annealed at an elevated temperature of 850ºC. Later, the third mask helps in making the final metal layer and the gate electrode used for immobilizing the receptor. Finally, the fourth mask lets us open some portion of the gate and the transistor region to allow liquid to cross through.
The next step to sensor fabrication and device gate opening is making the surface ready for immobilization of receptor, or so called surface functionalization. The antibody disulfide bridges between the heavy chains are cleaved in the presence of mercaptoethylamine (MEA) and EDTA whereas the disulfide bridges between the heavy chain and the light chain remains unaffected. This leaves behind a number of disulfide bonds which can be bound onto gold surface easily because of the strong interactions between the native thiol group and the gold surface. Finally, the sensor measurement is performed with Agilent B1530 parameter analyzer.
The figure 1 (c) represents the detection of NT- pro BNP at various concentrations. The graph shows the total charge accumulated against various concentrations of target proteins prepared in physiological environment (1X PBS). From the experiment performed, it can be observed that there is an increase in the change of charge with increase in the concentration of target proteins, which confirms the immobilization of antibody and ultimately the detection of target proteins. Moreover, the calibration curve for the sensor can be drawn by plotting change in the total charge against the concentrations with repeated testing of the device. Therefore, this method of detection is cheap, robust and time efficient making it also ideal for multi-sensor array and point-of-care diagnostics.