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A Novel and Robust Packaging Technology for Miniaturized FET-Based Biosensors with Microfluidic Channels

Monday, 30 May 2016: 11:25
Sapphire 411 B (Hilton San Diego Bayfront)
C. P. Hsu, P. C. Chen, and Y. L. Wang (National Tsing Hua University)
FET devices are extensively used for sensors, including gas sensors and biosensors. In contrast to traditional resistive devices, FET has transconductance gain, which can significantly improve the S/N ratio. Recently, more and more applications in biosensors combine microfluidic channels and the FET system. In FET-based biosensors, the wafer manufacturing process always requires a lot of cost, and most of the chip area is used for metal lines as interconnect. Miniaturized chip plays a key role in reducing the manufacturing cost. However, simultaneously integrating the sensor chip and microfluidic channels on one chip is challenging. In this study, a novel and robust packaging method has been developed, to effectively reduce the size of the sensor chip and thereby the cost. 1 mm x 1 mm FET sensor chip has been fabricated and embedded in epoxy. Photolithography and metal deposition were done followed by lift-off process for metal interconnect. The FET-embedded chip was passivated and covered by the microfluidic channel made of PDMS. Figure 1 shows the schematic of the system and the final package size is 1cm x 1cm. Electrical measurement is also proceeded with liquid sample to confirm the usability.