NiCo2O4 spinel may be used as a bifunctional catalyst for oxygen evolution and reduction reaction as electrode in both inorganic and organic electrosyntheses. Recently, NiCo2O4 spinel was found to be an infrared transparent conducting material with potential for solar or photoelectrochemical cell applications. For these applications, NiCo2O4obtained in thin film form is preferred.
By using rf magnetron sputtering technique, a NiCo2O4 solid film was deposited on a glass substrate from a sintered oxide target with the same composition. With annealing at adequate temperature, a thin film of nickel-cobalt oxides showing spinel structure was obtained. The electrical property of spinel film was measured using 4-probe technique. A resistivity as low as 10-2~10-1ohm/cm was obtained. The optical property of this spinel was also measured as a function of thickness/deposition time in the wavelength range of infrared radiation. The morphology and nano/microstructure of deposited and annealed films were examined using high resolution SEM.