Among the different gas sensing platforms, cantilever-based sensors have attracted considerable interest in recent years thanks to their ultra-sensitivity and high-speed response. The gas sensing mechanism in a dynamic cantilever sensor is based on its resonance frequency shift upon adsorption of a gas molecule on the sensor. In order to sensitize the surface of a cantilever, a sensitive receptor material with large surface area is required. Metal-organic frameworks (MOFs) are a class of nanoporous crystalline materials composed of metal ions coordinated to organic linkers. MOFs are promising for gas sensing applications as they have large surface area, rich porosity with adjustable pore size and excellent selective adsorption capability for various gasses.[1] Zeolite imidazole frameworks (ZIFs) are a class of MOFs where metals with tetrahedral coordination (i.e. Zn, Co, Fe, Cu) are the central node and the ligands are imidazolate-based organic molecules.

In this work, we developed a ZIF-based thin film for dynamic cantilever gas-sensing applications. We employed a novel atmospheric pressure spatial atomic layer deposition (AP-SALD)[2][3] technique to deposit a ZnO sacrificial layer on the silicon cantilevers. This technique allows the deposition of high-quality films at atmospheric pressure, faster than conventional ALD. The ZnO layer was then converted to a particular ZIF film with desired porosity and size, through a MOF-CVD process.[4] A gas-sensing bench setup was developed for the cantilever actuation and read-out. We present the chemical and morphological properties of the ZIF, as well as the frequency response of the sensor to various gases. The device showed reliable sensitivity to humidity, CO₂ and several VOCs.

References

[1] X. F. Wang, X. Z. Song, K. M. Sun, L. Cheng, and W. Ma, “MOFs-derived porous nanomaterials for gas sensing,” Polyhedron, vol. 152, pp. 155–163, 2018.

[2] D. Muñoz-Rojas, T. Maindron, A. Esteve, F. Piallat, J. C. S. Kools, and J. M. Decams, “Speeding up the unique assets of atomic layer deposition,” Mater. Today Chem., vol. 12, pp. 96–120, 2019.

[3] K. P. Musselman, C. F. Uzoma, and M. S. Miller, “Nanomanufacturing: High-Throughput, Cost-Effective Deposition of Atomic Scale Thin Films via Atmospheric Pressure Spatial Atomic Layer Deposition,” Chem. Mater., vol. 28, no. 23, pp. 8443–8452, 2016.

[4] I. Stassen et al., “Chemical vapour deposition of zeolitic imidazolate framework thin films,” Nat. Mater., vol. 15, no. 3, pp. 304–310, 2016.