D02 - Characterization and Reliability 1

Tuesday, 31 May 2022: 14:00-16:00
West Meeting Room 116 (Vancouver Convention Center)
Chairs:
Sunghwan Lee and Irina Ionica
14:00
1055
(Invited) Second Harmonic Generation: Non-Linear Optics for Characterization of Electrical Properties of Dielectric-on-Semiconductor Interfaces
I. Ionica, D. Damianos, B. Obeid, A. Kaminski (IMEP-LaHC, Univ. Grenoble Alpes, CNRS, Grenoble-INP, France), D. Blanc-Pélissier (INL, INSA de Lyon, France), G. Vitrant, G. Ghibaudo, S. Cristoloveanu, A. Bouchard, X. Mescot, M. Gri (IMEP-LaHC, Univ. Grenoble Alpes, CNRS, Grenoble-INP, France), M. Lei (FemtoMetrix), and L. Bastard (IMEP-LaHC, Univ. Grenoble Alpes, CNRS, Grenoble-INP, France)
14:40
1056
(Invited) Investigating Defects in the High-k/Ingaas System at Cryogenic Temperature
K. Cherkaoui, E. Caruso, J. Lin, S. Monaghan (Tyndall National Institute), A. Padovani, L. Larcher (Applied Materials), and P. Hurley (Tyndall National Institute)
15:20
1057
Plasma Charge Carrier Attachment Induced Transport in Solid Ionic Materials
K. M. Weitzel, J. L. Wiemer, and M. Schäfer (Philipps-Universitaet Marburg)
15:40
1058
Characterization of Passivation Dielectrics on Silicon through Second Harmonic Generation: Effect of Fixed Charge
B. Obeid, L. Bastard (IMEP-LaHC, Univ. Grenoble Alpes, CNRS, Grenoble-INP, France), V. Aubriet, K. Courouble, D. Dutartre (STMicroelectronics, Crolles, France), and I. Ionica (IMEP-LaHC, Univ. Grenoble Alpes, CNRS, Grenoble-INP, France)
See more of: D02: Dielectrics for Nanosystems 9: Materials Science, Processing, Reliability, and Manufacturing
See more of: Dielectric Science and Materials
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