Recently, demand for inductors is increasing due to the development of IoT, automatic driving devices, and eco-friendly electric vehicles, and for this reason, efficient and miniaturized inductor manufacturing technology is becoming important. To miniaturize the inductor, it is necessary to miniaturize the core part, which is the center of the inductor. A typical method for manufacturing a core part of inductor is a multilayer ceramic capacitor (MLCC). This method cross-laminate silicon and metal in order to make patterns. After cross-laminating, it needs to be contracted to make it smaller in sintering process. This process causes imprecision of dimension thus there is a limitation in miniaturization of the inductor.

The diameter of AAO used in this study is 25mm and its pore size is 200nm. 3 electrode electroplating is selected for plating FeCo on AAO, counter elctrode as Pt electrode, and FeCo were deposited on –1 V vs. Ag/AgCl and on differed time for 6h, 7h, and 8h. The concentration of electrolytes used for FeCo plating is Fe 0.15 M/L, Co 0.2 M/L, and ascobic acid 0.01 M/L. For electrolytes, 47.4 g/L of cobalt chloride hexahydrate, 35.6 g/L of ion sulfate hepahydrate, and 1.769 g/L of L - ascobic acid were used. After the plating, SEM images and EDS were used to see the deposition rate of FeCo nanowires and composition variation via time.

FeCo nanowires were generated via time for 6h, 7h, and 8h to see the deposition rate. Figure 1 shows SEM image of FeCo nanowire plated for 8 hours and figure 2 shows length of the FeCo nanowire via time. After removing the AAO using 3M NaOH, we measured the saturation magnetization of FeCo nanowire and was 167.2269 emu/g and the coercivity was 120 Oe as shown in figure 3. The saturation magnetization was different from theoretical value of FeCo, 245 emu/g, probably due to the poor crystallinity. The more details will be presented.