This work investigates the electrochemical properties of NMC111 as thin film cathode materials for thin film Li ion batteries. The films were deposited on Si substrate coated with Pt using a radio frequency magnetron sputtering system. The samples were post annealed after deposition and the it’s effect is discussed. Crystalline structures were obtained for samples annealed at 700 ^oC and O₂ atmosphere. The electrochemical properties of all solid state thin film batteries with the crystalline cathode, Lipon electrolyte and Li anode showed good capacity retention. This battery proved to be an effective solution for thin film and microbatteries.

Acknowledgement

This research was funded under the research grant #51763/ПЦФ-МЦРОАП РК-19 “New materials and devices for defense and aerospace applications” from MDDIAI Republic of Kazakhstan