Chevron-like structured SiCu (with 10%at. Cu) thin film is fabricated by ion assisted glancing angle deposition method (IA-GLAD). The possible use of this film as anode material in next generation lithium ion batteries has been evaluated. The galvanostatic test result shows that after 100 cycles, the electrode delivers 900 mAh/g when cycled with 100 mA/g rate. There might have possible reasons for such an improved capacity of the electrode: Cu atoms in the composite film promote electronic conductive pathways in the electrode. Plus Cu atoms might form solid solution phase with Si or generates small sized intermetalics which may enhance the reversibility of the lithiation reaction of the active material (Si in that case) with lithium. Moreover the existence of amorphous and/or nano-sized Si based particles can creates homogenously distributed nano-sized porosities as insterstitial spaces among them.