In this study, LiNi0.5Co0.2Mn0.3O2 cathode materials were prepared by co-precipitation method. RuO2 coating layer was deposited on LiNi0.5Co0.2Mn0.3O2powder using a shower head type PEALD reactor (Lucida-M100, NCD Technology), with IMBCH Ru [IMBCH = (η6-1-isopropyl-4-methylbenzene)(η4-cyclohexa-1,3-diene)] as a precursor.
We propose a new coating method for cathode materials using atomic layer deposition. The physical and electrochemical properties of RuO2 coated LiNi0.5Co0.2Mn0.3O2 cathode materials have been thoroughly investigated. Compared to various metal oxides, we will show that the optimization of RuO2 coating layer can be significantly improved the electrochemical performance of LiNi0.5Co0.2Mn0.3O2cathode materials.
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