The increasing demand for advanced electronic devices and energy storage have stimulated significant interest in the development of batteries of high capacity. Li ion based battery is the most promising system which is light-weight and energy-delivering efficient. Compared to the existing graphite-anode system, Si is known to have highest theoretical specific capacitance which makes Si be the most promising candidate for the next-generation anode material for lithium battery systems. However, the large volume expansion and the serious material pulverization of Si after cycling result in a poor life time, and become a stumbling block for being commercialized. In this research, glancing angle deposition (GLAD) technique is utilized to deposit uniform and aligned intrinsic Si-spiral nanostructure. By varying different rotation angles during GLAD, various spiral Si nanostructure with various porosities are deposited. With increasing rotation number , the porosity also increases giving as a result less Si volume occupation. The silicon content in the porous film can be precisely controlled from 77.5% to 74.69% by tuning the formation of the nanostructure. As a result the porous silicon film offers an enhanced battery cycle life for intrinsic silicon based anode material. TEM and XPS analysis were carried out to analyze the composition and bonding information for de-/lithiation mechanism. After the optimization, our porous Si anode shows an electrochemical performance with volumetric specific capacity of 2019.2 mAh/cm³. After 100 cycle test, the volumetric specific capacity retention still remains at 359.4 mAh/cm³. Furthermore, we believe that the adequate porosity helps to retard the enormous stress among the film by providing enough space for volume expansion to gain longer life time and better electrochemical performance.