Abstract: Sensitivity Enhancement of Metal-Oxide-Semiconductor Tunneling Temperature Sensor with Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> Dielectric Stacks (223rd ECS Meeting (May 12-17, 2013))

1508
Sensitivity Enhancement of Metal-Oxide-Semiconductor Tunneling Temperature Sensor with Al₂O₃/SiO₂ Dielectric Stacks

Tuesday, May 14, 2013

Osgoode Ballroom, Lower Concourse Level (Sheraton)

Chien-Chih Lin , National Taiwan University, Taipei, Taiwan

Jenn-Gwo Hwu , National Taiwan University, Taipei, Taiwan

Abstract:

J3-1508 (122.0KB) - Abstract Text