Comparative Studies of Depth Profiling by XPS, SIMS, GD-OES and SEM Techniques Performed on the Electrodeposited Silicon Based Films

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Comparative Studies of Depth Profiling by XPS, SIMS, GD-OES and SEM Techniques Performed on the Electrodeposited Silicon Based Films

Wednesday, May 15, 2013: 11:00

York, Mezzanine Level (Sheraton)

Agata Nora Krywko-Cendrowska, M.Sc. , Department of Physics, University of Basel, Warsaw, Poland

Laurent Marot, Dr. , Department of Physics, University of Basel

Laetitia Philippe, Dr. , EMPA, Swiss Federal Laboratories for Materials Science and Technology, Thun

Roland Steiner, Eng. , Department of Physics, University of Basel

Daniel Mathys, Eng. , Centre of Microscopy, University of Basel

Ernst Meyer, Prof. , Department of Physics, University of Basel

Marek Szklarczyk, Dr.Sc. , Faculty of Chemistry, University of Warsaw, 02-093 Warsaw, Poland

Abstract: