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Non-Heating Atomic Layer Deposition of TiO2 by Using Plasma Excited Water Vapor

Tuesday, May 14, 2013
Osgoode Ballroom, Lower Concourse Level (Sheraton)
Kensaku Kanomata, Master of Engineering , Yamagata University, Yonezawa, Japan
Katsuaki Momiyama, MS , Yamagata University, Yonezawa, Japan
Takahiko Suzuki , Yamagata University
Shigeru Kubota , Yamagata University
Kazuhiro Hirahara, Doctor of Science , Yamagata University
Fumihiko Hirose , Yamagata University

Abstract:

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