904
Characteristics Of SnSbSe (SSS) Thin Films Grown by Atomic Layer Deposition for High Performance Phase Change Random Access Memory (PCRAM)

Wednesday, May 15, 2013: 10:40
Essex Ballroom, Mezzanine Level (Sheraton)
Keun Lee, M.S. , SK hynix Semiconductor Inc., Icheon-si, South Korea
Sehun Kang, Dr. , SK hynix Semiconductor Inc.
Jachun Ku, Dr. , SK hynix Semiconductor Inc.
Kwon Hong, Dr. , SK hynix Semiconductor Inc.
Sungki Park, Dr. , SK hynix Semiconductor Inc.

Abstract:

  • E7-0904 (2383.9KB) - Abstract Text
See more of: Electrochemical and Semiconductor Devices
See more of: E7: Symposium on Processes at the Semiconductor Solution Interface 5
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