2463
Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process

Monday, October 28, 2013: 11:00
Union Square 15/16, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Alexey Ivanov, M.Sc. , Furtwangen University, Institute for Applied Research, Furtwangen, Germany
Ulrich Mescheder, Dr. , Furtwangen University, Institute for Applied Research
Peter Woias, Dr. , University of Freiburg IMTEK

Abstract:

  • I1-2463 (213.3KB) - Abstract Text