2646
Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers

Monday, October 28, 2013: 15:00
Union Square 25, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Ashesh Ray Chaudhuri, Doctoral student , UCL, Leuven, Belgium
Philippe Helin, PhD , IMEC
Simone Severi, PhD , IMEC
Rita Van Hoof , IMEC
Bert Du Bois , IMEC
Harrie Tilmans, PhD , IMEC
Laurent Francis, PhD , UCL
Ann Witvrouw, PhD , KUL

Abstract:

  • J1-2646 (275.6KB) - Abstract Text
See more of: Physical Sensors and Actuators
See more of: J1: Sensors, Actuators, and Microsystems General Session
See more of: Sensors and Displays: Principles, Materials, and Processing
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