2677
Study of Ultrathin TiO2 Metal Oxide Gas Sensor Deposited By Atomic Layer Deposition for Environmental Monitoring

Tuesday, October 29, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Steven Christopher Mills, BSEE, MSEE , North Carolina State University, Raleigh, NC
Bongmook Lee, PhD EE , North Carolina State University
Veena Misra, PhD EE , North Carolina State University

Abstract:

See more of: J1 Poster Session
See more of: J1: Sensors, Actuators, and Microsystems General Session
See more of: Sensors and Displays: Principles, Materials, and Processing
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