The Path from Invention to Product: Processing for Semiconductor Devices II

Wednesday, 8 October 2014: 08:40-09:40
Expo Center, 1st Floor, Universal 1 (Moon Palace Resort)
Chairs:
Lubomyr Romankiw and E. J. Taylor
08:40
885
Keynote: Integrating Discovery, Direct and Combinatorial Science for Solar Fuels Prototype Development
H. J. Lewerenz (California Institute of Technology)
09:20
886
Dual Damascene Copper Electroplating Enabled Scaling of the Wires and Multilevel Interconnects
P. M. Vereecken (imec, Belgium)
See more of: D2: Electrochemical Science and Technology: Challenges and Opportunities in the Path from Invention to Product
See more of: Electrochemical/Electroless Deposition
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