Fabrication and Characterization of All-Solid-state3D Li-Ion Microbatteries Based on TiO2 Nanotubes

The spectacular development of autonomous mobile systems has enhanced the race for the miniaturization of micropower sources. However, the storage performances of devices are seriously compromised when decreasing the size of the components down to the micrometer scale. This is particularly true for the development of all-solid-state microbatteries which are rapidly reaching performance limit in terms of energy and power densities. To overcome these issues, 3D microbatteries have attracted interest while remaining a technological challenge since it requires the marriage between materials science, electrochemistry, and microfabrication processes. In 2009, we proposed to use self-organized TiO₂ nanotubes (ntTiO₂) as a 3D negative electrode (Figure) for Li-ion microbatteries (Chem. Mater., 2009). This particular geometry is achieved by a simple electrochemical process (anodization) which improves significantly the electrochemical performance of the system. In this study will be proposed an all-solid-state 3D microbattery composed of a polymer electrolyte and a cathode material (LiFePO₄) successively deposited at the surface of the nanotubes. While the nanotubes and polymer layers are obtained by electrodeposition process, the cathode material is achieved by cathodic sputtering. We will present in this work, the influence of morphology, structure and chemical composition of the cathode material on the electrochemical performance of the microbatteries in terms of areal capacity, rate capability, and capacity fading.

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