Nano, Micro, and Giga Technology

Tuesday, 26 May 2015: 16:20-18:10
Williford Room B (Hilton Chicago)
Chairs:
Hiromu Ishii and Jean-Pierre Raskin
16:20
(Invited) Si-Based Micro-Nanomechanics for Ultimate Sensing
T. Ono, M. Toda, Y. J. Seo, and N. Inomata (Tohoku University)
16:50
(Invited) A Sub-1G MEMS Sensor
D. Yamane (Tokyo Institute of Technology, CREST, JST), T. Konishi (NTT Advanced Technology Corporation), H. Toshiyoshi (The University of Tokyo, CREST, JST), K. Masu, and K. Machida (Tokyo Institute of Technology, CREST, JST)
17:20
Intermission-3