Solid State Topics General Session - Morning Session 1

Wednesday, 27 May 2015: 08:00-10:00
PDR 7 (Hilton Chicago)
Chairs:
Kalpathy B Sundaram and O. M Leonte
08:00
Introductory Remarks
08:05
2282
Modification of Sacrificial Polymers for Low-Cost MEMS Packaging
O. Phillips and P. A. Kohl (Georgia Institute of Technology)
08:25
2283
Exploration of Chemical Bonding Transformation Mapping to Assist Low-k Dielectric Nanostructure Fabrication
S. Rimal, T. Mukherjee, A. Goswami, N. Ross, and O. Chyan (University of North Texas)
08:45
2284
(Dielectric Science & Technology Division Thomas D. Callinan Award) Boron Carbon Nitride Thin Films  for Low-k Dielectric Interconnect and Optical Applications
K. B. Sundaram, A. Prakash (University of Central Florida), and S. W. King (Intel Corporation)
09:30
Break
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