Tuesday, October 13, 2015: 08:00-09:00
105-B (Phoenix Convention Center)
Samares Kar and Dolf Landheer
Electrical Studies on Parylene-C Columnar Microfibrous Thin Films
I. H. Khawaji (The Pennsylvania State University), C. Chindam, W. Orfali (Taibah University, Kingdom of Saudi Arabia), O. O. Awadelkarim (The Pennsylvania State University), and A. Lakhtakia (The Pennsylvania State University)
Effect of Hydrogen Partial Pressure on in-Situ Steam Generation Oxide Layer (Cancelled)
Highly Robust Advanced Single Precursor Based k 2.4 ILD for Beol Cu Interconnects
D. Priyadarshini (IBM Research, Albany), S. V. Nguyen (IBM at Albany Nanotech), H. K. Shobha (IBM at Albany Nanotech), E. T. Ryan (GlobalFoundries), S. M. Gates (IBM Research), H. Huang (IBM Research, Albany), J. Chen (IBM Research, Albany), E. Liniger, S. A. Cohen (IBM T.J. Watson Research Center), C. K. Hu (IBM T.J. Watson Research Center), A. Madan, E. Adams (IBM Microelectronics), S. E. Molis (IBM Semiconductor Research and Development Center), T. J. Haigh (IBM at Albany Nanotech), G. Bonilla (IBM T.J. Watson Research Center), T. Standaert (IBM Research, Albany), D. F. Canaperi (IBM at Albany Nanotech), and A. Grill (IBM T.J. Watson Research Center)