Wednesday, October 14, 2015: 18:00-20:00
West Hall 1 (Phoenix Convention Center)
Characterization of Lift Off Resist during Thermal Compression Wafer Bonding Based on Polydimethylglutarimide (PMGI)
T. Dushatinski (Christopher Newport University), T. Matsumae (Old Dominion University), T. M. Abdel-Fattah (Applied Research Center, Jefferson National Lab), A. D. Koehler, J. D. Greenlee (NRC Postdoctoral Fellow Residing at NRL), T. J. Anderson, H. Baumgart (Old Dominion University, Applied Research Center), K. D. Hobart (Naval Research Laboratory), and F. J. Kub (Naval Research Laboratory)
