The desired thin films were produced through co-deposition from independently controlled targets onto substrates held on a rotating platform. Varying RF powers were placed on a Li2O target and a SiO2target in order to create a range of stoichiometric lithium silicate electrolytes. These thin films were deposited on silicon or KCl chips. Deposition duration was controlled to grow films to the requisite thickness for each composition and analysis technique. The Li/Si ratio of each thin film was determined by in inductively coupled plasma optical emission spectroscopy (ICP-OES). Samples were prepared for this analysis by dissolving a thin film deposited onto a KCl chip in DI water. Further compositional and structural analysis was completed using x-ray photoelectron spectroscopy (XPS). Film thickness was determined through profilometry.
In studies with lithium silicate glasses, local depolymerization of SiO4 tetrahedra created nanoscale phase separation, or Li-rich regions embedded in an insulating Si rich matrix. It has been shown that increased SiO2 content in glasses constrict Li percolation paths between these Li-rich regions thus strongly influencing Li mobility [4]. The structural arrangement of bonding oxygen (BO) and non-bonding oxygen (NBO) per SiO44-tetrahedral unit will be defined for each composition of thin film through raman spectroscopy. These local structural arrangements will help characterize the degree of nanoscale phase separation in our thin film. Phase purity in the higher scale structural bulk of our material will be verified though scanning electron microscopy with energy dispersive x-ray spectroscopy (SEM EDS). The cluster-tissue model proposes that glasses cooled at a high rate form clustered pseuodophases surrounded by regions of relatively more amorphous connective tissue [5]. We used Infrared Spectroscopy to examine if this structure is observed in our sputtered thin films, which essentially are glasses with even higher cooling rates.
A detailed understanding of the structure of our lithium silicate thin films will allow us to understand the framework through which Li ions must travel through this amorphous electrolyte. Future studies will include using impedance spectroscopy to analyze how the ionic conductivities are affected by the structural differences between each composition that we have defined in this work.
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