With the emergence of novel multifunctional internet of things and wearable electronic devices, the development of high performance energy storage devices is becoming increasingly important. Thin film solid state lithium batteries (TFBs) are known to be one of the most promising candidates to meet these applications’ demands.

In this context, it is expected that conformal deposition of additively patterned TFB layers would provide opportunities to enhance the device performance and widen the scope of possible form factor and integration schemes. Several options have been explored by our group, including key enabling technologies such as electrochemical deposition, vapor and atomic layer deposition as well as a combination thereof. Here we will discuss our efforts to develop advanced TFB architectures based on these approaches.