2624
2D MoSe2 Field Effect Transistor with Small Threshold Voltage for Piezoelectric Touch Sensor Applications

Wednesday, 16 May 2018: 14:20
Room 309 (Washington State Convention Center)
Y. Jeong, J. H. Park, J. Ahn, J. Y. Lim, and S. Im (Yonsei University)
Being implemented as an active component in the circuits, two dimensional (2D) transition metal dichalcogenide (TMD) transistors have two kinds of difficulties. First, regardless of carrier type, threshold voltage (Vth) of TMD 2D field effect transistors (FETs) is located far away from 0 V. Second, gate bias induced hysteresis exists in general 2D TMD transistors, causing an unstable operation of FETs. Here, we have fabricated stable n-channel MoSe2 FETs with a relatively small Vth of -5 V and minimized-hysteresis of 0.5 V. And we have checked the stable operation by integrating a smart touch sensor circuit composed of piezoelectric P(VDF-TrFE) polymer, the MoSe2 FET, and organic light emitting diode (OLED). To minimize the Vth and gate voltage hysteresis of 2D FET, we inserted ultrathin (8.46 nm) polystyrene (PS)-brush layer between MoSe2 channel and 50 nm-thin Al2O3 dielectric. Our MoSe₂ FET has showed a maximum drain-current (ID) of ~9 μA at VDS of 1 V along with a high linear mobility of 11.2 cm2/Vs. In the analogue touch sensor circuit gated by piezoelectric film of large scale Al/50 μm-thick P(VDF-TrFE)/ITO/glass, the MoSe₂ FET exhibites high ON/OFF ratio and ON-state ID which quite well demonstrated OLED pixel operation.