The scale growth mechanism consists of two interlinked levels. At the meta-level oxide nucleation and oxide grain growth are affected by the cation flux in the oxide scale formed and the nature of the oxygen species in the gas. This fixes the number, size and shape of the oxide grains as well as the number of oxide grain boundaries available as short-circuit diffusion paths. The lattice level denotes the atomic level. Hereby the cation flux in the single grain by lattice diffusion and cation vacancy condensation are linked. The defect structure in the oxide lattice is important. The factors affecting it are the Cr diffusion in the substrate and the presence of Ni in the alloy, local p(O2), H-defects and oxide growth stress. The experimental findings will be discussed with strong focus on the oxide growth mechanism, the chromia microstructure of the scales formed under the various conditions and the concentration and mobility of the native defects in the chromia scales and its interactions with H-containing species originating from water vapour in the test gas. Furthermore, the role of Fe as base and Ni as alloying element in the metal substrate will be discussed. This is done by considering the differences between the Ni-Cr-O and Fe-Cr-O phase diagrams and the consequence of the existence of the Fe3+ ion on the miscibility of the oxides formed by the various cations.