1305
Quasi-Epitaxial Growth of β-Ga2O3 Coated Wide Bandgap Semiconductor Tape for Flexible UV Photodetectors

Tuesday, 31 May 2022: 11:40
West Meeting Room 111 (Vancouver Convention Center)
X. Tang (KAUST) and X. Li (King Abdullah University of Science and Technology)
The epitaxial growth of technically important β-Ga2O3 semiconductor thin films has not been realized on flexible substrates due to the limitations of high-temperature crystallization conditions and lattice-matching requirements. We demonstrate the epitaxial growth of β-Ga2O3 (-201) thin films on flexible CeO2 (001)-buffered Hastelloy tape. The results indicate that CeO2 (001) has a small bi-axial lattice mismatch with β-Ga2O3 (-201), inducing simultaneous double-domain epitaxial growth. Flexible photodetectors are fabricated on epitaxial β-Ga2O3-coated tape. Measurements reveal that the photodetectors have a responsivity of 4 ×104 mA/W, with an on/off ratio reaching 1,000 under 254 nm incident light and 5 V bias voltage. Such photoelectrical performance is within the mainstream level of β-Ga2O3-based photodetectors using conventional rigid single-crystal substrates. More importantly, it remained robust against more than 20,000 bending-test cycles. Moreover, the technique paves the way for the direct in situ epitaxial growth of other flexible oxide semiconductor devices in the future.