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Humidity Effect on APCVD-Grown 2D Monolayer of MoS2

Wednesday, 1 June 2022
West Ballroom B/C/D (Vancouver Convention Center)
C. Patel (Indian Institute of Technology Indore, India) and S. Mukherjee (IIT Indore)
Recently, monolayer MoS2 has attracted the huge attention of the research community due to its inherent fascinating electronic and optoelectronic properties for various applications such as sensor, catalysis, and flexible electronics [1,2]. The structural stability of CVD-grown monolayer MoS2 is of great importance for nano and optoelectronic-based applications. Understanding the long-term ambient exposure effect on monolayer MoS2 is important for acquiring many overreaching goals of this material. Here, in this work, we have reported the systematic study of monolayer MoS2 degradation under long-term exposure in ambient conditions and in high vacuum environment. Uniform and highly crystalline monolayer MoS2 deposited on 300 nm SiO2/Si substrate via atmospheric pressure chemical vapor deposition system. It is observed that moisture penetrates between MoS2 and substrate surface due to the opposite surface energy nature of MoS2 and SiO2/Si which oxidizes the deposited MoS2 layer and peel off the MoS2 layer day by day from the substrate surface. Interestingly, it is observed that MoS2 degradation started from edges to the nucleus and the degradation rate of monolayer MoS2 in a high vacuum environment is very less as compared to ambient exposure. This suggests that oxygen concentration is one of the important parameters in the structural degradation of monolayer MoS2. Therefore, to preserve the long-term structural and chemical stability of monolayer MoS2, it is necessary to isolate it from oxygen and moisture environment.