Wednesday, 1 June 2022: 08:00
West Meeting Room 111 (Vancouver Convention Center)
Investigators at the University of Arkansas and XFAB, Inc. have recently received a National Science Foundation Mid-scale Research Infrastructure grant to support the acquisition of equipment to support a silicon carbide research and fabrication facility. This facility has several unique aspects. The fab, known as MUSiC (Multi-User SiC Fab), will perform two key functions. First, it will serve as a low-volume prototyping bridge between research laboratories and the fabrication advances achieved therein, and high volume manufacturing such as found at XFAB. In this capacity, researchers around the country in universities, industry, and government labs can submit designs in a multi-project wafer manner for developing new ideas and designs before committing to larger-scale production. Second, MUSiC serves as an outlet for research advances from investigators around the country. As new process developments such as etching, contacts, p-channel devices, surface state passivation, etc. are developed, the MUSiC facility stands ready to incorporate those advances into standard flows such as SiC CMOS, JFET, and Bipolar processes for integrated circuits, power devices, MEMS, and even SiC photonics. Another benefit of the MUSiC facility is that it will provide the opportunity for graduate students to visit and become more familiar with semiconductor fabrication methods and techniques. In this way, students from universities and programs that do not have the opportunity to provide such educational experiences can become a part of a growing US semiconductor fabrication sector in the coming years. This paper will present the overall concept of MUSiC, some of the details associated with the fabrication line, and the timelines associated with this infrastructure project.