(Invited) Nanospike Electrode Thin-Film Transistors: A New Design for Improved Nanoscale Tfts

Tuesday, 11 October 2022: 10:10
Room 214 (The Hilton Atlanta)
A. Dodabalapur, K. Liang (The University of Texas at Austin), C. McCulley, Y. Zhou (University of Texas at Austin), X. Wang (The University of Texas at Austin), and X. Xu (University of Texas at Austin)
A new design for short channel length thin-film transistors (TFTs) is proposed and demonstrated with indium gallium zinc oxide (IGZO) and organic semiconductor active layers. The principal advantages of the new design arise from two distinct effects: (i) Nanospike array electrodes produce field-emission enhanced charge injection from the source/drain contacts to the semiconductor and lead to higher currents, current densities, and carrier velocities. (ii) Quasi-three-dimensional gate control at low gate voltages leading to improved turn-off characteristics, better sub-threshold swing and reduced drain voltage dependence of sub-threshold behavior. These advantages are very beneficial for back-end-of-the-line (BEOL) TFTs and will also apply to most other semiconductor material TFTs with Schottky contacts. Multi-nanospike TFTs with channel lengths as small as 50 nm, and single nanospike TFTs with channel lengths of ~ 10 nm have been fabricated.