Manipulation of Anode Nanostructure and Composition By Glancing Angle Deposition for Thin-Film Solid Oxide Fuel Cells

Cha, Suk Won

Co-sputtering is a simple yet effective technique for fabricating a thin film of composite materials and different compositions by adjusting the electrical power of each sputtering target. However, practical issues arise when depositing cermet materials such as Ni-YSZ and Ni-GDC because of the contrasting characteristics of metal and ceramic sputtering targets. For example, the surface binding energy of GDC is significantly higher than that of Ni, resulting in a considerably lower sputtering yield of GDC. The difference in sputtering yield is further exacerbated by the low power density limit of the GDC target, which is set by its unfavorable material properties such as brittleness and low thermal conductivity. In contrast, due to its magnetic property, Ni requires sufficiently high sputtering power during magnetron sputtering.

This work combines co-sputtering with advanced sputtering techniques such as glancing angle deposition (GLAD) and oblique angle deposition (OAD) to fabricate otherwise unobtainable Ni-GDC anode microstructure with various compositions. Reduced flux capture area of Ni caused by the high incident angle of GLAD allowed control of thin-film compositions, and optimal composition was determined based on fuel cell performance and electrochemical impedance spectroscopy (EIS) analysis. A sufficient amount of GDC was necessary to expand the triple-phase boundary (TPB) and suppress the thermal agglomeration of highly mobile Ni.

The effect of electrode nanostructure on fuel cell performance was also investigated. The ballistic shadowing effect during OAD was utilized to produce thin-film electrodes with various porosities. With the increase of the deposition angle, the porosity increased, whereas the in-plane electrical conductivity decreased due to the reduced density. The columnar structure was also manipulated by managing the substrate position through azimuthal rotation. As a result, various columnar structures such as vertical posts, slanted posts, and zig-zag were fabricated, and the optimal microstructure was determined via electrochemical examinations.