D04 - Session 3

Tuesday, 11 October 2022: 14:00-17:20
Room 311 (The Hilton Atlanta)
14:00
(Invited) Formation of Nanostructures and Nanopores By Plasma Deposition and Etching Processes
D. Hegemann (Empa)
14:40
(Invited) Atmospheric Pressure Plasma-Assisted Electrospinning of Bead-Free Honeycomb-Patterned Nanofibers Via a Controlled Self-Assembly-Driven Phenomenon
R. Morent, R. Ghobeira, and N. De Geyter (Ghent University)
15:20
Plasmonic Carbon Nanoforest for Cancerogenic Mycotoxins SERS Detection
V. Shvalya (Jozef Stefan Institute), N. M. Santhosh (Jožef Stefan Institute), J. Zavašnik (Jožef Stefan Institute, Jožef Stefan International Postgraduate School), and U. Cvelbar (Jozef Stefan Institute)
15:40
Break
16:00
Precise Uniformity Control of Spin-on-Carbon Etch Process By Etch Tool Correction
J. Si, L. Yin, S. Chi, X. Ke, E. Chong, and H. Zhang (Semiconductor Manufacturing International Corporation)
16:20
Oxygen-Based Reactive Ion Etching of Ruthenium Thin Film
E. J. Yoon, J. Q. Su, and Y. Kuo (Texas A&M University)
16:40
(Invited) Transport and Reaction Kinetics of Thermal ALE in High Aspect Ratio Hafnium Oxide Structures
A. Fischer, D. Mui, A. Routzahn, R. J. Gasvoda, J. Sims, and T. Lill (Lam Research Corporation)
See more of: D04: Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 4
See more of: Dielectric Science and Materials
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