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Tensor Evaluation of Stress Relaxation Profile in Strained SiGe Nanostructures on Si Substrate

Tuesday, May 14, 2013: 09:00
Provincial Ballroom North, Second Floor (Sheraton)
Motohiro Tomita , Research Fellow of the Japan Society for the Promotion of Science, Kanagawa, Japan
Daisuke Kosemura , Meiji University
Koji Usuda , Collaborative Research Team Green Nanoelectronics Center, AIST
Atsushi Ogura , Meiji University

Abstract:

  • E2-0744 (168.9KB) - Abstract Text
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