1142
Monolithic Integration of Micro-Capacitors by Lithographically Patternable, Wafer-Scale Single-Walled Carbon Nanotube Film
Tuesday, May 14, 2013: 17:20
Civic Ballroom North, Second Floor (Sheraton)
Kazufumi Kobashi
,
National institute of advanced industrial science and technology
Karolina U. Laszczyk
,
National institute of advanced industrial science and technology
Atsuko Sekiguchi
,
National institute of advanced industrial science and technology
Fumiaki Tanaka
,
National institute of advanced industrial science and technology
Chandramouli Subramaniam
,
National institute of advanced industrial science and technology
Don N. Futaba
,
National institute of advanced industrial science and technology
Takeo Yamada
,
National institute of advanced industrial science and technology
Kenji Hata
,
National institute of advanced industrial science and technology, Tsukuba, Japan
