996
Spatially Resolved Studies of Copper Electroplating by Scanning Transmission X-Ray Microscopy

Wednesday, May 15, 2013: 15:20
Windsor West, Mezzanine Level (Sheraton)
Zhisheng Qin, MSc , McMaster University, Hamilton, ON, Canada
Vincent Lee , McMaster University, Hamilton, ON, Canada
Adam P. Hitchcock, PhD , McMaster University

Abstract:

See more of: Afternoon Session
See more of: F2: Novel Design and Electrodeposition Modalities
See more of: Electrochemical/Chemical Deposition and Etching
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