917
A Study of SiC:P Selective Epitaxial Growth by Uniform Experimental Design
Wednesday, May 15, 2013
Osgoode Ballroom, Lower Concourse Level (Sheraton)
Yonggen He
,
School of Microelectronics of Fudan University
Yong Chen
,
Semiconductor Manufacturing International Corporation
Guohui Cai
,
Semiconductor Manufacturing International Corporation
Youfeng He
,
Semiconductor Manufacturing International Corporation
Shaofeng Yu
,
Semiconductor Manufacturing International Corporation
Jingang Wu
,
Semiconductor Manufacturing International Corporation
David Wei Zhang
,
School of Microelectronics of Fudan University
Chenyu Wang
,
Applied Materials China
Jiyue Tang
,
Applied Materials China
Ganming Zhao
,
Applied Materials China
Shiyuan Yang
,
Semiconductor Manufacturing International Corporation
