Materials Technology

Monday, May 13, 2013: 14:00-14:40
Dominion Ballroom North, Second Floor (Sheraton)
Chair:
Bich-Yen Nguyen
14:00
880
Atomic Scale Thickness Control of SOI Wafers for Fully Depleted Applications
Walter Schwarzenbach, Ph. D., SOITEC; Nicolas Daval, Ph. D., SOITEC; Vincent Barec, SOITEC; Olivier Bonnin, Ph. D., SOITEC; Pablo-Eduardo Acosta-Alba, SOITEC; Catherine Maddalon, Ph. D., SOITEC; Alexandre Chibko, SOITEC; Timothy Robson, Ph. D., SOITEC; Bich-Yen Nguyen, Ph. D., SOITEC; Christophe Maleville, Ph. D., SOITEC
See more of: E6: Advanced Semiconductor-on-Insulator Technology and Related Physics 16
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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