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Atomic Scale Thickness Control of SOI Wafers for Fully Depleted Applications

Monday, May 13, 2013: 14:00
Dominion Ballroom North, Second Floor (Sheraton)
Walter Schwarzenbach, Ph. D. , SOITEC, Bernin, France
Nicolas Daval, Ph. D. , SOITEC
Vincent Barec , SOITEC
Olivier Bonnin, Ph. D. , SOITEC
Pablo-Eduardo Acosta-Alba , SOITEC
Catherine Maddalon, Ph. D. , SOITEC
Alexandre Chibko , SOITEC
Timothy Robson, Ph. D. , SOITEC
Bich-Yen Nguyen, Ph. D. , SOITEC
Christophe Maleville, Ph. D. , SOITEC

Abstract:

  • E6-0880 (136.8KB) - Abstract Text
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See more of: E6: Advanced Semiconductor-on-Insulator Technology and Related Physics 16
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