Film and Structure Growth on Semiconductors
Wednesday, May 15, 2013: 15:00-16:20
Essex Ballroom, Mezzanine Level (Sheraton)
15:00
Mechanism of Polyphosphazene Like Film Formation on InP in Liquid Ammonia (218 K)
Christian Njel, PhD student, University of Versailles UMR 8180-Institut Lavoisier de Versailles (78000) France;
Anne-Marie Goncalves, University of Versailles UMR 8180-Institut Lavoisier de Versailles (78000) France;
Damien Aureau, University of Versailles UMR 8180-Institut Lavoisier de Versailles (78000) France;
Dimitri Mercier, University of Versailles UMR 8180-Institut Lavoisier de Versailles (78000) France;
Arnaud Etcheberry, University of Versailles UMR 8180-Institut Lavoisier de Versailles (78000) France
15:40
Growth Characteristics and Dielectric Properties of ALD-Ta2O5 Thin Film Using TaCl5 Precursor
Chin Moo Cho, Samsung Electronics Co., Ltd.;
Sang Yeol Kang, Samsung Electronics Co., Ltd.;
Jae Hyoung Choi, Samsung Electronics Co., Ltd.;
Jae-soon Lim, Samsung Electronics Co., Ltd.;
Su Hwan Kim, Samsung Electronics Co., Ltd.;
Younsoo Kim, Samsung Electronics Co., Ltd.;
Cha-Young Yoo, Samsung Electronics Co., Ltd.;
Ho-Kyu Kang, Samsung Electronics Co., Ltd.