1885
(Invited) Molecular Layer Deposition

Friday, November 1, 2013: 08:20
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
David C Cameron , Lappeenranta University of Technology, Mikkeli, Finland
Tatyana V Ivanova , Lappeenranta University of Technology

Abstract:

See more of: Materials Diversification
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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