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(Invited) MEMS and Photonics Module Integration into SiGe BiCMOS Technology for More than Moore Functional Diversification

Monday, October 28, 2013: 15:30
Continental 7, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Bernd Tillack, Dr. , Technische Universität Berlin, Frankfurt, Germany
Bernd Heinemann, Dr. , IHP
Mehmet Kaynak , IHP
Dieter Knoll, Dr. , IHP
Stefan Lischke , IHP
Andreas Mai, Dr. , IHP
Holger Rücker, Dr. , IHP
Yuji Yamamoto, Dr. , IHP
Lars Zimmermann, Dr. , IHP

Abstract:

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