2382
The Advanced Monitoring of Organic Additives in Copper Electroplating Baths

Tuesday, October 29, 2013: 09:20
Union Square 23/24, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Michael Pavlov, Ph.D. , ECI Technology, Totowa, NJ
Eugene Shalyt, Ph.D. , ECI Technology
Peter Bratin, Ph.D. , ECI Technology
Xiaoxuan Sun, M.Sc. , Columbia University

Abstract:

See more of: Electrochemical Nanofabrication in Emerging Applications
See more of: F5: Emerging Opportunities in Electrochemical Deposition for Nanofabrication
See more of: Electrochemical/Chemical Deposition and Etching
<< Previous Abstract | Next Abstract >>